octafluorocyclobutane

[化] 八氟环丁烷; 氟利昂C318

释义与例句

n.
  1. 1.

    The organofluorine compound C₄F₈, related to cyclobutane by replacement of all C–H bonds with C–F bonds, and used as a deposition gas and etchant in semiconductor manufacture.

    不可数

词源

From octa- + fluoro- + cyclobutane.

来源：wiktionary